Molybdenum oxide thin films grown on flexible ITO-coated PET substrates
Molybdenum oxide thin films were deposited on stiff and flexible substrates by reactive DC magnetron sputtering. Two sets of samples were prepared. The first with different O<sub>2</sub>/Ar flow rate ratios and the second, fixing the oxygen content, with different time of deposition. As...
Main Author: | |
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Other Authors: | , , , , , , , , , |
Format: | article |
Language: | eng |
Published: |
2021
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Subjects: | |
Online Access: | http://hdl.handle.net/1822/72549 |
Country: | Portugal |
Oai: | oai:repositorium.sdum.uminho.pt:1822/72549 |