Development of tantalum oxynitride thin films produced by PVD: study of structural stability

Sectoral Operation Programme Human Resources Development (SOP HRD), ID76945 financed from the European Social Fund and by the Romanian Government.

Detalhes bibliográficos
Autor principal: Cristea, D. (author)
Outros Autores: Crisan, A. (author), Barradas, N. P. (author), Alves, E. (author), Moura, C. (author), Vaz, F. (author), Cunha, L. (author)
Formato: article
Idioma:eng
Publicado em: 2013
Assuntos:
Tantalum oxynitride
Structure
Annealing
Structural stability
Science & Technology
Texto completo:http://hdl.handle.net/1822/27158
País:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/27158

Texto Completo

http://hdl.handle.net/1822/27158

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