Development of tantalum oxynitride thin films produced by PVD: study of structural stability

Sectoral Operation Programme Human Resources Development (SOP HRD), ID76945 financed from the European Social Fund and by the Romanian Government.

Bibliographic Details
Main Author: Cristea, D. (author)
Other Authors: Crisan, A. (author), Barradas, N. P. (author), Alves, E. (author), Moura, C. (author), Vaz, F. (author), Cunha, L. (author)
Format: article
Language:eng
Published: 2013
Subjects:
Tantalum oxynitride
Structure
Annealing
Structural stability
Science & Technology
Online Access:http://hdl.handle.net/1822/27158
Country:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/27158

Internet

http://hdl.handle.net/1822/27158

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