High-performance pull-in time accelerometer
A closed-loop accelerometer based on electrostatic pull-in time is presented here. The main goal is to achieve high-performance, namely in respect to noise and sensitivity, with a very simple readout mechanism. An integrated system was implemented comprising actuation and readout circuitry, FPGA and...
Main Author: | |
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Other Authors: | , , , , , |
Format: | conferencePaper |
Language: | eng |
Published: |
2015
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Subjects: | |
Online Access: | http://hdl.handle.net/1822/50659 |
Country: | Portugal |
Oai: | oai:repositorium.sdum.uminho.pt:1822/50659 |