Experiments and modelling in N2-H2 capacitively coupled radio-frequency discharges at low pressure
This work uses experiments and simulations to analyze the modifications induced in pure N2 capacitively coupled radio-frequency discharges, running at low pressure (0.6–1.2 mbar) and low power (5–20 W), by the addition of small amounts of H2 (up to 5%). Simulations use a hybrid code coupling a two-d...
| Main Author: | |
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| Other Authors: | , , , , |
| Format: | conferenceObject |
| Language: | eng |
| Published: |
2013
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| Online Access: | http://hdl.handle.net/1822/26109 |
| Country: | Portugal |
| Oai: | oai:repositorium.sdum.uminho.pt:1822/26109 |