High-resolution MEMS inclinometer based on pull-in voltage

High-resolution pull-in-based microelectromechanical system (MEMS) inclinometers are presented in this paper. Pull-in is characterized by the sudden loss of stability in electrostatically actuated parallel-plate structures, and since pull-in voltage is stable and easy to measure, it enables an effec...

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Bibliographic Details
Main Author: Alves, Filipe Manuel Serra (author)
Other Authors: Dias, Rosana Maria Alves (author), Cabral, Jorge (author), Gaspar, João (author), Rocha, Luís Alexandre Machado (author)
Format: article
Language:eng
Published: 2015
Subjects:
Inclinometer
MEMS
Pull-in voltage
FPGA
Science & Technology
Online Access:http://hdl.handle.net/1822/50657
Country:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/50657

Internet

http://hdl.handle.net/1822/50657

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