Auto-calibrated capacitive MEMS accelerometer
An electronic calibration technique for capacitive MEMS accelerometers based on the measurement of pull-in voltages is described. A combination of pull-in voltages and resonance frequency measurements can be used for the estimation of processinduced variations in device dimensions from layout and de...
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| Other Authors: | , , , |
| Format: | book |
| Language: | eng |
| Published: |
2008
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| Subjects: | |
| Online Access: | https://hdl.handle.net/10216/71536 |
| Country: | Portugal |
| Oai: | oai:repositorio-aberto.up.pt:10216/71536 |
| Summary: | An electronic calibration technique for capacitive MEMS accelerometers based on the measurement of pull-in voltages is described. A combination of pull-in voltages and resonance frequency measurements can be used for the estimation of processinduced variations in device dimensions from layout and deviations in material properties from nominal value, which enables auto-calibration. Measurements on fabricated devices confirm the validity of the proposed technique and electronic calibration is experimentally demonstrated. |
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