On-chip integrated silicon bulk-micromachined soil moisture sensor based on the DPHP method

This paper reports the design, modelling, fabrication and assembly of a silicon bulk-micromachined soil moisture microsensor using the Dual-Probe Heat-Pulse (DPHP) method. Soil humidity measurement is essential to studysoil preservation and control the development of plants, namely in closed ecosyst...

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Bibliographic Details
Main Author: Valente, A. (author)
Other Authors: Couto, Carlos (author), Correia, J. H. (author)
Format: conferencePaper
Language:eng
Published: 2001
Subjects:
Soil moisture sensor
Soil water content
Heat capacity sensor
Integrated microsensor
Online Access:http://hdl.handle.net/1822/5426
Country:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/5426

Internet

http://hdl.handle.net/1822/5426

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