Combined in-depth X-ray Photoelectron Spectroscopy and Time-of-Flight Secondary Ion Mass Spectroscopy study of the effect of deposition pressure and substrate bias on the electrical properties and composition of Ga-doped ZnO thin films grown by magnetron sputtering

This work reports the effect of the applied substrate bias and deposition pressure on the bulk composition, electrical and microstructural properties of Gallium-doped Zinc Oxide thin films deposited by DC magnetron sputtering. In-depth Time-of-Flight Secondary Ion Mass Spectrometry and X-ray Photoel...

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Detalhes bibliográficos
Autor principal: Correia, Filipe Costa (author)
Outros Autores: Ribeiro, Joana Margarida Fernandes Silva (author), Salvador, Paulo Miguel Babo Cunha (author), Welle, Alexander (author), Bruns, Michael (author), Mendes, Adélio (author), Tavares, C. J. (author)
Formato: article
Idioma:eng
Publicado em: 2018
Assuntos:
Thin films
Transparent conductive oxide
Gallium-doped zinc oxide
In-depth composition
Electrical properties
Science & Technology
Texto completo:http://hdl.handle.net/1822/72415
País:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/72415

Texto Completo

http://hdl.handle.net/1822/72415

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