Fabrication and characterization of polyimide-based ‘smooth’ titanium nitride microelectrode arrays for neural stimulation and recording
Objective. As electrodes are required to interact with sub-millimeter neural structures, innovative microfabrication processes are required to enable fabrication of microdevices involved in such stimulation and/or recording. This requires the development of highly integrated and miniaturized systems...
Main Author: | |
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Other Authors: | , , , , , |
Format: | article |
Language: | eng |
Published: |
2020
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Subjects: | |
Online Access: | http://hdl.handle.net/1822/71746 |
Country: | Portugal |
Oai: | oai:repositorium.sdum.uminho.pt:1822/71746 |