Influence of air oxidation on the properties of decorative NbOxNy coatings prepared by reactive gas pulsing

In this work the oxidation resistance of DC reactive sputtered niobium oxynitrides and its influence on the properties of the films are studied. The depositions have been carried out by DC magnetron sputtering with a reactive gas pulsing process. The nitrogen flow was kept constant and the oxygen fl...

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Bibliographic Details
Main Author: Chappé, J. M. (author)
Other Authors: Carvalho, P. (author), Lanceros-Mendez, S. (author), Vasilevskiy, M. I. (author), Vaz, F. (author), Machado, A. V. (author), Fenker, M. (author), Kappl, H. (author), Parreira, N. M. G. (author), Cavaleiro, A. (author), Alves, E. (author)
Format: article
Language:eng
Published: 2008
Subjects:
Niobium oxynitride
Reactive sputtering
Structure
Hardness
Optical reflectance
Online Access:http://hdl.handle.net/10316/4192
Country:Portugal
Oai:oai:estudogeral.sib.uc.pt:10316/4192

Internet

http://hdl.handle.net/10316/4192

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