Influence of air oxidation on the properties of decorative NbOxNy coatings prepared by reactive gas pulsing

In this work the oxidation resistance of DC reactive sputtered niobium oxynitrides and its influence on the properties of the films are studied. The depositions have been carried out by DC magnetron sputtering with a reactive gas pulsing process. The nitrogen flow was kept constant and the oxygen fl...

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Detalhes bibliográficos
Autor principal: Chappé, J. M. (author)
Outros Autores: Carvalho, P. (author), Lanceros-Mendez, S. (author), Vasilevskiy, M. I. (author), Vaz, F. (author), Machado, A. V. (author), Fenker, M. (author), Kappl, H. (author), Parreira, N. M. G. (author), Cavaleiro, A. (author), Alves, E. (author)
Formato: article
Idioma:eng
Publicado em: 2008
Assuntos:
Niobium oxynitride
Reactive sputtering
Structure
Hardness
Optical reflectance
Texto completo:http://hdl.handle.net/10316/4192
País:Portugal
Oai:oai:estudogeral.sib.uc.pt:10316/4192

Texto Completo

http://hdl.handle.net/10316/4192

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