Structural and mechanical properties of nanocrystalline Zr co-sputtered a-C(:H) amorphous films
The aim of this study was to investigate the effect of Zr as alloying element to carbon films, particularly in respect to film structure and mechanical properties. The films were deposited by magnetron sputtering in reactive (Ar + CH4) and non-reactive (Ar) atmosphere with different Zr contents (fro...
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| Other Authors: | , , |
| Format: | article |
| Language: | eng |
| Published: |
2014
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| Subjects: | |
| Online Access: | http://hdl.handle.net/10316/27750 |
| Country: | Portugal |
| Oai: | oai:estudogeral.sib.uc.pt:10316/27750 |