Gas viscosity mems sensor based on pull-in
A novel method for measuring the viscosity of gases is introduced here, that uses a parallel-plate capacitive device, electrostatically actuated to pull-in. In welldefined actuation and damping conditions, the pull-in time is proportional to viscosity of the gas medium between the plates, since visc...
| Main Author: | |
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| Other Authors: | , , |
| Format: | conferencePaper |
| Language: | eng |
| Published: |
2013
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| Subjects: | |
| Online Access: | http://hdl.handle.net/1822/26861 |
| Country: | Portugal |
| Oai: | oai:repositorium.sdum.uminho.pt:1822/26861 |