Tantalum oxynitride thin films: Assessment of the photocatalytic efficiency and antimicrobial capacity
Tantalum oxynitride thin films have been deposited by reactive magnetron sputtering, using a fixed proportion reactive gas mixture (85% N<sub>2</sub> + 15% O<sub>2</sub>). To produce the films, the partial pressure of the mixture in the working atmosphere was varied. The char...
Autor principal: | |
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Outros Autores: | , , , , , , , |
Formato: | article |
Idioma: | eng |
Publicado em: |
2019
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Assuntos: | |
Texto completo: | http://hdl.handle.net/1822/60125 |
País: | Portugal |
Oai: | oai:repositorium.sdum.uminho.pt:1822/60125 |