Pull-in-based μg-resolution accelerometer: characterization and noise analysis
The pull-in time (tpi) of electrostatically actuated parallel-plate microstructures enables the realization of a high-sensitivity accelerometer that uses time measurement as the transduction mechanism. The key feature is the existence of a metastable region that dominates pull-in behavior, thus maki...
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| Other Authors: | , , |
| Format: | article |
| Language: | eng |
| Published: |
2011
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| Subjects: | |
| Online Access: | http://hdl.handle.net/1822/14655 |
| Country: | Portugal |
| Oai: | oai:repositorium.sdum.uminho.pt:1822/14655 |