Lithium cobalt oxide crystallization on flexible polyimide substrate
This work reports the fabrication and characterization of lithium cobalt oxide films (LiCoO2) on flexible Kapton® substrate. LiCoO2 is commonly used as cathode of lithium microbatteries but needs an annealing of 700 °C, which is not compatible with most flexible substrates. LiCoO2 films were deposit...
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| Other Authors: | , , , , , , |
| Format: | article |
| Language: | eng |
| Published: |
2016
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| Subjects: | |
| Online Access: | http://hdl.handle.net/1822/38152 |
| Country: | Portugal |
| Oai: | oai:repositorium.sdum.uminho.pt:1822/38152 |
| Summary: | This work reports the fabrication and characterization of lithium cobalt oxide films (LiCoO2) on flexible Kapton® substrate. LiCoO2 is commonly used as cathode of lithium microbatteries but needs an annealing of 700 °C, which is not compatible with most flexible substrates. LiCoO2 films were deposited by reactive RF sputtering followed by an annealing process at 400 °C for 1 h in vacuum and air atmospheres both in silicon and Kapton® substrates. Raman spectroscopy, X-ray diffraction patterns and scanning electron microscopy images were used to evaluate samples crystallinity and morphology. Films fabricated in Kapton® and silicon substrates were compared. |
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