The role of modulated IR radiometry measurements in the characterization of Zr-O-N thin films

This work is devoted to the investigation of relevant thermal transport parameters of multifunctional ZrOxNy thin films, prepared in strict controlled conditions. Composition and structural characterizations revealed the existence of two different types of films, with a structural change from fcc Zr...

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Bibliographic Details
Main Author: Macedo, Francisco (author)
Other Authors: Carvalho, Pedro (author), Cunha, L. (author), Vaz, F. (author), Gibkes, Juergen (author), Bein, Bruno K. (author), Plezl, Josef (author)
Format: article
Language:eng
Published: 2009
Subjects:
Coatings
Dc magnetron sputtering
Modulated IR radiometry
Thermal properties
Zr-O-N
Science & Technology
Online Access:http://hdl.handle.net/1822/13634
Country:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/13634

Internet

http://hdl.handle.net/1822/13634

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