Enhanced resistive switching and multilevel behavior in bilayered HfAlO/HfAlOx structures for non-volatile memory applications
In this work, hafnium aluminum oxide (HfAlO) thin films were deposited by ion beam sputtering deposition technique on Si substrate. The presence of oxygen vacancies in the HfAlOx layer deposited in oxygen deficient environment is evidenced from the photoluminescence spectra. Furthermore, HfAlO(oxyge...
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| Other Authors: | , , |
| Format: | article |
| Language: | eng |
| Published: |
2015
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| Subjects: | |
| Online Access: | http://hdl.handle.net/1822/39410 |
| Country: | Portugal |
| Oai: | oai:repositorium.sdum.uminho.pt:1822/39410 |