The structure and photoluminescence of erbium-doped nanocrystalline silicon thin films produced by reactive magnetron sputtering

We have produced and studied undoped and erbium-doped nanocrystalline silicon thin films in order to evaluate the erbium influence on the film microstructure and how this correlates with the photoluminescence properties. Films were grown by reactive RF sputtering. For the doped films metallic erbium...

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Bibliographic Details
Main Author: Cerqueira, M. F. (author)
Other Authors: Losurdo, M. (author), Stepikhova, M. (author), Conde, O. (author), Giangregorio, M. M. (author), Pinto, Pedro (author), Ferreira, J. A. (author)
Format: conferencePaper
Language:eng
Published: 2002
Subjects:
Online Access:http://hdl.handle.net/1822/13965
Country:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/13965