Characterization of magnetron sputtered sub-stoichiometric CrAlSiNx and CrAlSiOyNx coatings

The influence of varying nitrogen and oxygen partial pressures on microstructure, mechanical and optical properties of magnetron sputtered CrAlSiNx and CrAlSiOyNx coatings has been studied. The partial pressure of nitrogen reactive gaswas varied from0.037 Pa to 0.15 Pa for CrAlSiNx films, and the N2...

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Detalhes bibliográficos
Autor principal: Al-Rjoub, A. (author)
Outros Autores: Costa, P. (author), Rebouta, L. (author), Cerqueira, M. F. (author), Alpuim, P. (author), Barradas, N. P. (author), Alves, E. (author)
Formato: article
Idioma:eng
Publicado em: 2017
Assuntos:
CrAlSiNx
Optical properties
CrAlSiOyNx
Chemical structure
Hardness
CrAlSiO N y x
Ciências Naturais::Ciências Físicas
Science & Technology
Texto completo:http://hdl.handle.net/1822/48540
País:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/48540

Texto Completo

http://hdl.handle.net/1822/48540

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