Characterization of magnetron sputtered sub-stoichiometric CrAlSiNx and CrAlSiOyNx coatings

The influence of varying nitrogen and oxygen partial pressures on microstructure, mechanical and optical properties of magnetron sputtered CrAlSiNx and CrAlSiOyNx coatings has been studied. The partial pressure of nitrogen reactive gaswas varied from0.037 Pa to 0.15 Pa for CrAlSiNx films, and the N2...

Full description

Bibliographic Details
Main Author: Al-Rjoub, A. (author)
Other Authors: Costa, P. (author), Rebouta, L. (author), Cerqueira, M. F. (author), Alpuim, P. (author), Barradas, N. P. (author), Alves, E. (author)
Format: article
Language:eng
Published: 2017
Subjects:
CrAlSiNx
Optical properties
CrAlSiOyNx
Chemical structure
Hardness
CrAlSiO N y x
Ciências Naturais::Ciências Físicas
Science & Technology
Online Access:http://hdl.handle.net/1822/48540
Country:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/48540

Internet

http://hdl.handle.net/1822/48540

Similar Items