Atomically controlled, self-limiting procedures for growth of aluminum oxide on SiC-on-Si
Abstract number 0451, Abstract book page P-02-008
Main Author: | |
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Other Authors: | , |
Format: | conferenceObject |
Language: | eng |
Published: |
2020
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Subjects: | |
Online Access: | http://hdl.handle.net/10362/92002 |
Country: | Portugal |
Oai: | oai:run.unl.pt:10362/92002 |