Atomically controlled, self-limiting procedures for growth of aluminum oxide on SiC-on-Si

Abstract number 0451, Abstract book page P-02-008

Bibliographic Details
Main Author: Silva, Ana Cristina Gomes (author)
Other Authors: Pedersen, Kjeld (author), Li, Zheshen S. (author)
Format: conferenceObject
Language:eng
Published: 2020
Subjects:
Online Access:http://hdl.handle.net/10362/92002
Country:Portugal
Oai:oai:run.unl.pt:10362/92002