Photoluminescence of erbium doped microcrystalline silicon thin films produced by reactive magnetron sputtering
Microcrystalline silicon thin films doped with erbium were produced by RF sputtering and their structural, chemical and optical properties were studied by X-ray diffractometry at grazing incidence, Rutherford back scattering and optical transmission spectroscopy. The samples exhibit a sharp photolum...
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| Other Authors: | , |
| Format: | article |
| Language: | eng |
| Published: |
2001
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| Subjects: | |
| Online Access: | http://hdl.handle.net/1822/14173 |
| Country: | Portugal |
| Oai: | oai:repositorium.sdum.uminho.pt:1822/14173 |