Compact gate valve for UHV
The authors acknowledge the Portuguese Foundation for Science and Technology for the financial support to this work. It was partially supported through the project PRAXIS 3/31/MMA/1764/95.
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| Format: | article |
| Language: | eng |
| Published: |
2019
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| Online Access: | https://doi.org/10.1016/S0042-207X(01)00379-7 |
| Country: | Portugal |
| Oai: | oai:run.unl.pt:10362/76919 |