APA (7th ed.) Citation

Borges, J. N. P., Vaz, F., & Marques, L. (2010). AlNxOy thin films deposited by DC reactive magnetron sputtering.

Chicago Style (17th ed.) Citation

Borges, Joel Nuno Pinto, F. Vaz, and L. Marques. AlNxOy Thin Films Deposited by DC Reactive Magnetron Sputtering. 2010.

MLA (8th ed.) Citation

Borges, Joel Nuno Pinto, et al. AlNxOy Thin Films Deposited by DC Reactive Magnetron Sputtering. 2010.

Warning: These citations may not always be 100% accurate.