High resolution pull-in inclinometer
A MEMS high-resolution inclinometer is presented in this paper. Unlike traditional approaches, a transduction mechanism based on the measurement of pull-in voltages is used for the realization of the sensor. The advantage is on-device capability for auto-calibration and thermal compensation, and mor...
| Autor principal: | |
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| Outros Autores: | , , , |
| Formato: | conferencePaper |
| Idioma: | eng |
| Publicado em: |
2013
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| Assuntos: | |
| Texto completo: | http://hdl.handle.net/1822/26862 |
| País: | Portugal |
| Oai: | oai:repositorium.sdum.uminho.pt:1822/26862 |