A SU-8 fluidic microsystem for biological fluids analysis

This paper describes a fluidic microsystem fabricated in SU-8 for suitable on-chip liquid handling and mixing. Its application is the concentration measurement of biomolecules in biological fluids. The SU-8 fabrication process is a low-cost process, biocompatible, UV lithography semiconductor compat...

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Bibliographic Details
Main Author: Ribeiro, J. C. (author)
Other Authors: Minas, Graça (author), Turmezei, P. (author), Wolffenbuttel, R. F. (author), Correia, J. H. (author)
Format: conferencePaper
Language:eng
Published: 2004
Subjects:
SU-8 techniques
Fluidic microsystem
Biomolecules analysis
Online Access:http://hdl.handle.net/1822/2350
Country:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/2350
Description
Summary:This paper describes a fluidic microsystem fabricated in SU-8 for suitable on-chip liquid handling and mixing. Its application is the concentration measurement of biomolecules in biological fluids. The SU-8 fabrication process is a low-cost process, biocompatible, UV lithography semiconductor compatible and not requires expensive masks. Moreover, SU-8 process allows deeps microchannels with very low roughness and suitable for optical absorption measurement.

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