Sensitivity linearization technique for a time based MEMS accelerometer

A high-resolution, high-sensitivity capacitive accelerometer based on pull-in time measurement is described in this paper. The high sensitivity of pull-in time is being explored to implement high performance accelerometers, and non-linearity is the main characteristic compromising device performance...

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Bibliographic Details
Main Author: Dias, R. A. (author)
Other Authors: Wolffenbuttel, R. F. (author), Cretu, E. (author), Rocha, Luís A. (author)
Format: conferencePaper
Language:eng
Published: 2011
Subjects:
Pull-in time
High sensitivity
MEMS accelerometer
g-resolution
Online Access:http://hdl.handle.net/1822/14719
Country:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/14719

Internet

http://hdl.handle.net/1822/14719

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