Optical metrology for nanotechnology
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | conferenceObject |
| Language: | eng |
| Published: |
2010
|
| Online Access: | http://hdl.handle.net/10400.9/782 |
| Country: | Portugal |
| Oai: | oai:repositorio.lneg.pt:10400.9/782 |
| Main Author: | Coelho, João M. P. (author) |
|---|---|
| Other Authors: | Rebordão, José Manuel (author) |
| Format: | conferenceObject |
| Language: | eng |
| Published: |
2010
|
| Online Access: | http://hdl.handle.net/10400.9/782 |
| Country: | Portugal |
| Oai: | oai:repositorio.lneg.pt:10400.9/782 |