Capacitively coupled hydrogen discharges : modeling vs. experiment
This paper presents a systematic characterization of hydrogen capacitively coupled very high frequency discharges, produced within a parallel plate cylindrical setup, by comparing numerical simulations to experimental measurements for various plasma parameters. A good quantitative agreement is found...
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| Other Authors: | , , |
| Format: | article |
| Language: | eng |
| Published: |
2004
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| Subjects: | |
| Online Access: | http://hdl.handle.net/1822/3011 |
| Country: | Portugal |
| Oai: | oai:repositorium.sdum.uminho.pt:1822/3011 |