Structural and photoluminescence studies of erbium implanted nanocrystalline silicon thin films

Hydrogenated amorphous and nanocrystalline silicon thin films deposited by Hot Wire (HW) and Radio-Frequency Plasma-Enhanced (RF) Chemical Vapor Deposition were Er-bium-implanted. Their pre-implantation structural properties and post-implantation optical properties were studied and cor-related. Afte...

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Bibliographic Details
Main Author: Cerqueira, M. F. (author)
Other Authors: Alpuim, P. (author), Filonovich, Sergej (author), Alves, E. (author), Rolo, Anabela G. (author), Andrês, G. (author), Soares, J. (author), Kozanecki, A. (author)
Format: article
Language:eng
Published: 2009
Subjects:
Nanocrystalline silicon thin films
RFCVD
HWCVD
Structural properties
Er emission
Science & Technology
Online Access:http://hdl.handle.net/1822/13767
Country:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/13767

Internet

http://hdl.handle.net/1822/13767

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