The effect of the ion beam energy on the properties of indium tin oxide thin films prepared by ion beam assisted deposition
Indium tin oxide (ITO) thin films have been deposited onto polycarbonate substrates by ion beam assisted deposition technique at room temperature. The structural, optical and electrical properties of the films have been characterized by X-ray diffraction, atomic force microscopy, optical transmittan...
| Autor principal: | |
|---|---|
| Outros Autores: | , , , |
| Formato: | article |
| Idioma: | eng |
| Publicado em: |
2008
|
| Assuntos: | |
| Texto completo: | http://hdl.handle.net/1822/13705 |
| País: | Portugal |
| Oai: | oai:repositorium.sdum.uminho.pt:1822/13705 |