The effect of the ion beam energy on the properties of indium tin oxide thin films prepared by ion beam assisted deposition

Indium tin oxide (ITO) thin films have been deposited onto polycarbonate substrates by ion beam assisted deposition technique at room temperature. The structural, optical and electrical properties of the films have been characterized by X-ray diffraction, atomic force microscopy, optical transmittan...

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Bibliographic Details
Main Author: Meng Lijian (author)
Other Authors: Gao Jinsong (author), Santos, M. P. dos (author), Wang Xiaoyi (author), Wang Tongtong (author)
Format: article
Language:eng
Published: 2008
Subjects:
ITO
Thin film
Polycarbonate
Ion beam assisted deposition
Science & Technology
Online Access:http://hdl.handle.net/1822/13705
Country:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/13705

Internet

http://hdl.handle.net/1822/13705

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