Boosting Electrical Performance of High-κ Nanomultilayer Dielectrics and Electronic Devices by Combining Solution Combustion Synthesis and UV Irradiation

Grant SFRH/BPD/99136/2013 Grant SFRH/BD/122286/2016 Grant SFRH/BD/116047/2016 IDS-FunMat-INNO project FPA2016/EIT/EIT RawMaterials Grant Agreement 15015.

Bibliographic Details
Main Author: Carlos, Emanuel (author)
Other Authors: Branquinho, Rita (author), Kiazadeh, Asal (author), Martins, Jorge (author), Barquinha, Pedro (author), Martins, Rodrigo (author), Fortunato, Elvira (author)
Format: article
Language:eng
Published: 2019
Subjects:
DUV irradiation
low operating voltage TFTs
low temperature
nanomultilayer dielectric oxides (AlO and HfO)
solution combustion synthesis
Materials Science(all)
Online Access:https://doi.org/10.1021/acsami.7b11752
Country:Portugal
Oai:oai:run.unl.pt:10362/71733

Internet

https://doi.org/10.1021/acsami.7b11752

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