FPGA controlled MEMS inclinometer

A FPGA (Field Programmable Gate Array) controlled inclinometer based on MEMS structures is presented in this paper. Pull-in voltage measurements are used in this work as the transduction mechanism. The pull-in phenomenon is characterized by the sudden loss of stability in electrostatically actuated...

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Detalhes bibliográficos
Autor principal: Alves, F. S. (author)
Outros Autores: Dias, Rosana A. (author), Cabral, Jorge (author), Rocha, Luís A. (author), Monteiro, João L. (author)
Formato: conferencePaper
Idioma:eng
Publicado em: 2013
Assuntos:
MEMS
Pull-in voltage
Inclinometer
FPGA
Science & Technology
Texto completo:http://hdl.handle.net/1822/26679
País:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/26679

Texto Completo

http://hdl.handle.net/1822/26679

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