Autonomous MEMS Inclinometer
Pull-in voltage measurements are used in this work as the transduc-tion mechanism to build a novel microelectromechanical system (MEMS) incli-nometer. By successively bringing the microstructure to pull-in while measur-ing the pull-in voltage allows the detection of external accelerations. Moreover,...
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| Other Authors: | , , |
| Format: | conferencePaper |
| Language: | eng |
| Published: |
2012
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| Subjects: | |
| Online Access: | http://hdl.handle.net/1822/21192 |
| Country: | Portugal |
| Oai: | oai:repositorium.sdum.uminho.pt:1822/21192 |