Autonomous MEMS Inclinometer
Pull-in voltage measurements are used in this work as the transduc-tion mechanism to build a novel microelectromechanical system (MEMS) incli-nometer. By successively bringing the microstructure to pull-in while measur-ing the pull-in voltage allows the detection of external accelerations. Moreover,...
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| Other Authors: | , , |
| Format: | conferencePaper |
| Language: | eng |
| Published: |
2012
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| Subjects: | |
| Online Access: | http://hdl.handle.net/1822/21192 |
| Country: | Portugal |
| Oai: | oai:repositorium.sdum.uminho.pt:1822/21192 |
| Summary: | Pull-in voltage measurements are used in this work as the transduc-tion mechanism to build a novel microelectromechanical system (MEMS) incli-nometer. By successively bringing the microstructure to pull-in while measur-ing the pull-in voltage allows the detection of external accelerations. Moreover, the availability of asymmetric pull-in voltages that depend on the same mechan-ical structure and properties enables the implementation of an auto-calibrated thermal compensated inclinometer. The thermal compensation method is de-scribed and it relies on the measurement of pull-in voltages only. Both simulations and experiments are used to validate this novel approach and first results show a sensitivity of 50mV/º and a resolution of 0.006º |
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