Optical microsystems in silicon based on a fabry-perot resonance cavity
This thesis discusses the theory, design and realization of two different types of microspectrometers - the scanning type and array type - for application in the visible part of the spectrum. Furthermore, a fully integrated optical microsystem based on a sixteen-channels array-type configuration, wi...
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| Format: | book |
| Language: | eng |
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1999
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| Online Access: | http://hdl.handle.net/1822/5425 |
| Country: | Portugal |
| Oai: | oai:repositorium.sdum.uminho.pt:1822/5425 |