Closed loop operation of time-based accelerometers
In this paper we present a method for closed-loop operation of pull-in time accelerometers. Accelerometers based on the measurement of the pull-in time of movable parallel-plates MEMS structures have already demonstrated very good resolution capabilities, with low requirements on the capacitive read...
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| Outros Autores: | , , |
| Formato: | conferencePaper |
| Idioma: | eng |
| Publicado em: |
2012
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| Assuntos: | |
| Texto completo: | http://hdl.handle.net/1822/21888 |
| País: | Portugal |
| Oai: | oai:repositorium.sdum.uminho.pt:1822/21888 |
| Resumo: | In this paper we present a method for closed-loop operation of pull-in time accelerometers. Accelerometers based on the measurement of the pull-in time of movable parallel-plates MEMS structures have already demonstrated very good resolution capabilities, with low requirements on the capacitive readout. However, open-loop operation delivers very low dynamic range and highly non-linear response. The closed-loop approach relies on electrostatic feedback using counter-actuation electrodes opposite to the pull-in direction and although the control algorithm used was very simple, the dynamic range has been effectively extended and the linearity improved. |
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