Study of Annealed Indium Tin Oxide-Films prepared by RF Reactive Magnetron Sputtering

Tin doped indium oxide (ITO) films were deposited on glass substrates by rf reactive magnetron sputtering using a metallic alloy target (In-Sn, 90-10). The post-deposition annealing has been done for ITO films in air and the effect of annealing temperature on the electrical, optical and structural p...

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Detalhes bibliográficos
Autor principal: Meng, L. J. (author)
Outros Autores: Maçarico, António Filipe Ruas da Trindade (author), Martins, R. (author)
Formato: article
Idioma:eng
Publicado em: 2014
Assuntos:
Optical-Properties
Thin-Films
Electrical-Properties
Deposition
Substrate
Texto completo:http://hdl.handle.net/10400.21/3603
País:Portugal
Oai:oai:repositorio.ipl.pt:10400.21/3603

Texto Completo

http://hdl.handle.net/10400.21/3603

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