Study of Annealed Indium Tin Oxide-Films prepared by RF Reactive Magnetron Sputtering

Tin doped indium oxide (ITO) films were deposited on glass substrates by rf reactive magnetron sputtering using a metallic alloy target (In-Sn, 90-10). The post-deposition annealing has been done for ITO films in air and the effect of annealing temperature on the electrical, optical and structural p...

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Bibliographic Details
Main Author: Meng, L. J. (author)
Other Authors: Maçarico, António Filipe Ruas da Trindade (author), Martins, R. (author)
Format: article
Language:eng
Published: 2014
Subjects:
Optical-Properties
Thin-Films
Electrical-Properties
Deposition
Substrate
Online Access:http://hdl.handle.net/10400.21/3603
Country:Portugal
Oai:oai:repositorio.ipl.pt:10400.21/3603

Internet

http://hdl.handle.net/10400.21/3603

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