Electrical characterization of capacitively-coupled radio-frequency discharges in hydrogen
This work presents modeling and experimental results for the electrical characterization of capacitively-coupled radio-frequency discharges in hydrogen. A two-dimensional, time-dependent fluid model is used to describe the dynamics of electrons and positive ions H+, H2+, and H3+at different frequenc...
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| Outros Autores: | , |
| Formato: | article |
| Idioma: | eng |
| Publicado em: |
2007
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| Assuntos: | |
| Texto completo: | http://hdl.handle.net/1822/6530 |
| País: | Portugal |
| Oai: | oai:repositorium.sdum.uminho.pt:1822/6530 |