Fabrication of a MEMS micromirror based on bulk silicon micromachining combined with grayscale lithography

A 1D MEMS (Micro-Electro-Mechanical Systems) mirror for LiDAR applications, based on vertically asymmetric comb-drive electrostatic actuators, is presented in this work employing a novel fabrication process. This novel micromachining process combines typical SOI-based bulk micromachining and graysca...

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Bibliographic Details
Main Author: Garcia, Ines S. (author)
Other Authors: Ferreira, Carlos (author), Santos, Joana D. (author), Martins, Marcos Silva (author), Dias, Rosana Maria Alves (author), Aguiam, Diogo E. (author), Cabral, Jorge (author), Gaspar, Joao (author)
Format: article
Language:eng
Published: 2020
Subjects:
Mirrors
Electrodes
Lithography
Resists
Micromechanical devices
Actuators
Fabrication
Bulk-micromachining process
grayscale
MEMS mirror
scanner
vertically asymmetric electrodes
Science & Technology
Online Access:http://hdl.handle.net/1822/71123
Country:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/71123

Internet

http://hdl.handle.net/1822/71123

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