Full-gap tracking system for parallel plate electrostatic actuators using closed-loop control

Bi-directional full-gap tracking on parallel-plate electrostatic actuators using closed-loop control is demonstrated in this paper. On-Off control is explored, where the actuator position is controlled by actuating or releasing the actuator based on the actual position (weather it is above or below...

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Bibliographic Details
Main Author: Moreira, Eurico Esteves (author)
Other Authors: Lima, Vasco António Lourenço (author), Alves, Filipe Manuel Serra (author), Cabral, Jorge (author), Gaspar, João (author), Rocha, Luís Alexandre Machado (author)
Format: article
Language:eng
Published: 2016
Subjects:
Electrostatic micro-actuators
Control system
PID control
Feedback linearization
FPGA
MEMS
Tracking
Science & Technology
Online Access:http://hdl.handle.net/1822/50711
Country:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/50711

Internet

http://hdl.handle.net/1822/50711

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