Influence of vibrational kinetics in a low pressure capacitively coupled hydrogen discharge
In this paper we present the self consistent coupling of a 2D model of a parallel plate radio frequency discharge in pure hydrogen with a homogeneous chemical kinetics model including H2(X1Σg+,v=0..14) molecules and hydrogen atoms H(n=1-5). The model can estimate the ground state atomic hydrogen den...
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| Other Authors: | , , |
| Format: | article |
| Language: | eng |
| Published: |
2003
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| Subjects: | |
| Online Access: | http://hdl.handle.net/1822/4385 |
| Country: | Portugal |
| Oai: | oai:repositorium.sdum.uminho.pt:1822/4385 |