Nanostructured Cr(N,O) based thin films for relative humidity sensing

This work presents multifunctional coatings prepared by Physical Vapor Deposition with Oblique Angle deposition with relative humidity sensing capability. Thin films based on chromium oxynitride (Cr(N,O)) were prepared with zigzag nanostructures and varying the amount of nitrogen and oxygen in order...

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Detalhes bibliográficos
Autor principal: Ferreira, A. (author)
Outros Autores: Silva, J. P. (author), Correia, D. M. (author), Pereira, N. (author), Correa, M. A. (author), Lanceros-Méndez, S. (author), Vaz, F. (author)
Formato: article
Idioma:eng
Publicado em: 2021
Assuntos:
Multifunctional coatings
DC sputtering
Chromium oxide
Relative humidity
Humidity sensing
Ciências Naturais::Ciências Físicas
Science & Technology
Texto completo:https://hdl.handle.net/1822/75478
País:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/75478

Texto Completo

https://hdl.handle.net/1822/75478

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