Nanostructured Cr(N,O) based thin films for relative humidity sensing

This work presents multifunctional coatings prepared by Physical Vapor Deposition with Oblique Angle deposition with relative humidity sensing capability. Thin films based on chromium oxynitride (Cr(N,O)) were prepared with zigzag nanostructures and varying the amount of nitrogen and oxygen in order...

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Bibliographic Details
Main Author: Ferreira, A. (author)
Other Authors: Silva, J. P. (author), Correia, D. M. (author), Pereira, N. (author), Correa, M. A. (author), Lanceros-Méndez, S. (author), Vaz, F. (author)
Format: article
Language:eng
Published: 2021
Subjects:
Multifunctional coatings
DC sputtering
Chromium oxide
Relative humidity
Humidity sensing
Ciências Naturais::Ciências Físicas
Science & Technology
Online Access:https://hdl.handle.net/1822/75478
Country:Portugal
Oai:oai:repositorium.sdum.uminho.pt:1822/75478

Internet

https://hdl.handle.net/1822/75478

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