Silver-based reflective coatings for micromachined optical filters
Silver films of 40 nm thickness, evaporated on a 300 nm thick low-stress silicon nitride layer, are used as high-quality mirrors operating in the visible and near IR spectral range. Application of a silicon nitride membrane under tension, placed within a square Si frame after bulk micromachining, im...
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| Other Authors: | , |
| Format: | article |
| Language: | eng |
| Published: |
1999
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| Subjects: | |
| Online Access: | http://hdl.handle.net/1822/3778 |
| Country: | Portugal |
| Oai: | oai:repositorium.sdum.uminho.pt:1822/3778 |