Synthesis of Al-Doped ZnO films assisted with hollow-cathode glow discharge and their characterization

Transparent conductive oxides, such as aluminum-doped zinc oxide (AZO), are of substantial importance for use in a broad range of applications because of their excellent optical and electrical properties. AZO film can be deposited by using several conventional techniques, although they suffer from l...

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Bibliographic Details
Main Author: Feitor, Michelle Cequeira (author)
Other Authors: Queiroz, José César Augusto de (author), Naeem, Muhammad (author), Azevedo Filho, João Batista (author), Liborio, Maxwell Santana (author), Santos, E. J. C. (author), Sousa, R. R. M. (author), Costa, Thércio Henrique de Carvalho (author), Khan, Naveed H. (author)
Format: article
Language:eng
Published: 2021
Subjects:
Hollow-cathode glow discharge
Aluminum-doped zinc oxide
Transmittance
Resistivity
Bandgap
Online Access:https://doi.org/QUEIROZ, J.C.A.; NAEEM, M.; A. AZEVEDO FILHO, J.B.; LIBÓRIO, M.S.; SANTOS, E.J.C.; FEITOR, M.C.; SOUSA, R.R.M.; COSTA, T.H.C.; KHAN, K.H.. Synthesis of Al-Doped ZnO Films Assisted with Hollow-Cathode Glow Discharge and Their Characterization. Journal of Electronic Materials, [S.l.], v. 50, n. 5, p. 2687-2698, 19 fev. 2021. Disponível em: https://link.springer.com/article/10.1007%2Fs11664-021-08802-1. Acesso em: 14 abr. 2021. http://dx.doi.org/10.1007/s11664-021-08802-1.
https://doi.org/10.1007/s11664-021-08802-1
Country:Brazil
Oai:oai:https://repositorio.ufrn.br:123456789/45394

Internet

https://doi.org/QUEIROZ, J.C.A.; NAEEM, M.; A. AZEVEDO FILHO, J.B.; LIBÓRIO, M.S.; SANTOS, E.J.C.; FEITOR, M.C.; SOUSA, R.R.M.; COSTA, T.H.C.; KHAN, K.H.. Synthesis of Al-Doped ZnO Films Assisted with Hollow-Cathode Glow Discharge and Their Characterization. Journal of Electronic Materials, [S.l.], v. 50, n. 5, p. 2687-2698, 19 fev. 2021. Disponível em: https://link.springer.com/article/10.1007%2Fs11664-021-08802-1. Acesso em: 14 abr. 2021. http://dx.doi.org/10.1007/s11664-021-08802-1.
https://doi.org/10.1007/s11664-021-08802-1

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